AVIZA Technology, Inc.
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Diffusion & LPCVD Furnaces

Aviza Technology’s production-proven portfolio of vertical furnaces is designed to provide high productivity, superior process results, and the lowest cost of ownership (CoO).

* RVP-300plus™ for high volume manufacturing for up to 300-mm wafers at 90 nm with extendibility to 65 nm.

* AVP/RVP 200™ for 150-mm and 200-mm wafers from 350 nm to 90 nm.

* VTR 7000/7000PLUS™ for 200-mm and below wafer processing provides low cost of ownership, process flexibility and high throughput, while meeting multi-generation process requirements.

Certified Refurbished VTR, AVP and APCVD systems are available.